# Code for video library(rsm) library(openxlsx) library(dplyr) library(car) par(mfrow = c(1,1), oma=c(1,1,1,1), mar=c(4,4,2,1)) ##### CCD Design # Default is 6 center replicates. The book data only came with 4, 0 in star block etch_design <- ccd(Line_size~Power.cd+Pressure.cd+HBr.cd, n0=c(4,0), alpha="rotatable", coding=list(Power.cd~(Power-150)/30, Pressure.cd~(Pressure-25)/5, HBr.cd~(HBr_pct-15)/5), randomize=TRUE, oneblock=TRUE) etch_design ##### Attach and bring in the experiment data source("pg/setup experiment data.R") Close <- filter(data_etch, Feature_space == "Close") with(Close, pairs(cbind(Line_size, Power.cd, Pressure.cd, HBr.cd))) Close ##### Fit regression model, run diagnostics rsm_close <- rsm(Line_size~SO(Power.cd, Pressure.cd, HBr.cd)+factor(x_density), data=Close) summary(rsm_close) qqPlot(rsm_close) plot(rsm_close, 1) # plot(rsm_close, 3) ##### Inspect the result, conclude the model par(mfrow = c(2,3), oma=c(1,0,1,1), mar=c(7,5,0,1)) contour(rsm_close, ~ Power.cd+Pressure.cd+HBr.cd, nlevels=20, at=(list(x_density=1)), image=TRUE) persp(rsm_close, ~ Power.cd+Pressure.cd+HBr.cd, at=(list(x_density=1)), zlab="\n\n\n\nLine size delta", col = "bisque")